Evolution of a Plasma Plume From a Shower Anode in a Vacuum Arc With a Black-Body Electrode Configuration

The plasma plume extracted from a shower anode of a vacuum arc with a black-body assembly (VABBA) was imaged in various development stages. In the VABBA, cathode erosion products fill a closed chamber formed by the cathode and a refractory anode. The anode is heated by the arc and reevaporates any cathode material incident upon it. An expanding metallic plasma plume is extracted through small apertures in the shower anode. The plasma plume was utilized to deposit a Cu thin film on a relatively large substrate.