Title :
Equivalent networks for SAW gratings
Author :
Koshiba, Masanori ; Mitobe, Seiichi
Author_Institution :
Dept. of Electron. Eng., Hokkaido Univ., Sapporo, Japan
Abstract :
An equivalent-network approach is described for the analysis of surface-acoustic-wave gratings. Circuit parameters can be theoretically determined by applying the finite-element method to an infinite array. In this approach, all of the effects of piezoelectric perturbation, mechanical perturbation, and energy storage are taken into account. To show the validity and usefulness of this approach, examples are computed for groove and metallic gratings. Both short and open circuited metallic gratings are treated. For grooves on isotropic and Y-Z LiNbO/sub 3/ substrates, the dependence of reflection characteristics on groove depth is investigated. For aluminum strips on X-112 degrees Y LiTaO/sub 3/ 34 degrees Y-X quartz, Y-Z LiNbO/sub 3/, and 128 degrees Y-X LiNbO/sub 3/ substrates, the dependence on metallization ratio is investigated in detail.<>
Keywords :
equivalent circuits; surface acoustic wave devices; LiNbO/sub 3/; LiTaO/sub 3/; SAW gratings; SiO/sub 2/; energy storage; equivalent-network; finite-element method; mechanical perturbation; metallization ratio; piezoelectric perturbation; Aluminum; Circuits; Energy storage; Gratings; Metallization; Phased arrays; Reflection; Strips; Surface acoustic waves; Surface waves;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on