DocumentCode
1265893
Title
In Situ Fabrication and Actuation of Polymer Magnetic Microstructures
Author
Chung, Su Eun ; Kim, Jiyun ; Choi, Sung-Eun ; Kim, Lily Nari ; Kwon, Sunghoon
Author_Institution
Inter-Univ. Semicond. Res. Center, Seoul Nat. Univ., Seoul, South Korea
Volume
20
Issue
4
fYear
2011
Firstpage
785
Lastpage
787
Abstract
We demonstrate a single-exposure in situ magnetic actuator fabrication technique using magnetic nanoparticles (MNs) containing UV curable polymer in a Polydimethylsiloxane (PDMS) channel. Microstructures with a 3-D anchored cantilever as well as free-floating components are fabricated in a single step at a single site without the use of a sacrificial layer. By controlling the location of high oxygen concentration area through PDMS substrate patterning, we can create partially bound and free-floating movement-restricted structures. This allows us to create complex magnetic actuators, such as a 3-D anchored cantilever, motor type, and rail-guided magnetic actuators. The actuating performance of UV photopatterned magnetic microstructures depends on the MN concentration in photopolymer resin and magnetic field intensity. The measured translational velocity of magnetic microactuators with a 1 : 10 MN concentration is 140 μm/s under 1400 G of magnetic field in poly(ethylene glycol) diacrylate resin. Also, we demonstrate selective magnetic actuation of heterogeneous structures composed of magnetic and nonmagnetic parts self-assembled in railed microfluidic channels. Only magnetic parts from the assembly selectively actuated due to the magnetic field without response to the flow. Therefore, we have developed a versatile magnetic microstructure fabrication method that is very simple and fast, enabling rapid in situ fabrication and actuation.
Keywords
electromagnetic actuators; microactuators; microfabrication; microfluidics; nanoparticles; polymers; ultraviolet lithography; 3D anchored cantilever; MN concentration; PDMS channel; PDMS substrate patterning; UV curable polymer; UV photopatterned magnetic microstructures; free-floating components; free-floating movement-restricted structures; heterogeneous structures; high-oxygen concentration area; in situ actuation; in situ fabrication; magnetic field intensity; magnetic microactuators; magnetic microstructure fabrication method; magnetic nanoparticles; measured translational velocity; motor type; nonmagnetic part self-assembly; partially-bound movement-restricted structures; photopolymer resin; polydimethylsiloxane channel; polyethylene glycol diacrylate resin; polymer magnetic microstructures; rail-guided magnetic actuators; railed microfluidic channels; sacrificial layer; selective magnetic actuation; velocity 140 mum/s; Actuators; Fabrication; Magnetic resonance imaging; Magnetic separation; Microstructure; Polymers; Rails; Fabrication; magnetic materials; microactuators; microassembly; photolithography;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2011.2159093
Filename
5942134
Link To Document