Title :
Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films
Author :
Wang, L.-P. ; Deng, K. ; Zou, L. ; Wolf, R. ; Davis, R.J. ; Trolier-McKinstry, S.
Author_Institution :
Pennsylvania State Univ., University Park, PA, USA
fDate :
4/1/2002 12:00:00 AM
Abstract :
MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.
Keywords :
accelerometers; diaphragms; frequency response; lead compounds; micromachining; micromechanical resonators; microsensors; piezoelectric thin films; piezoelectric transducers; thermal stability; 35.3 to 3.7 kHz; 5.6 micron; DRIE bulk-micromachining; MEMS accelerometers; PZT; PZT thick films; PbZrO3TiO3; annular diaphragm sensing structures; broad usable frequency range; dynamic frequency response; inertial sensing structure; low transverse sensitivity; numerical models; one axis sensitivity; piezoelectric films; resonant frequencies; temperature stability; Accelerometers; Frequency; Microelectromechanical systems; Micromechanical devices; Numerical models; Stability; Temperature sensors; Testing; Thick films; Titanium compounds;
Journal_Title :
Electron Device Letters, IEEE
