Title :
Resonant Microcantilevers for the Determination of the Loss Modulus of Thin Polymer Films
Author :
Ayela, Cédric ; Heinrich, Stephen M. ; Josse, Fabien ; Dufour, Isabelle
Author_Institution :
Lab. de l´´Integration du Materiau au Syst., Univ. de Bordeaux, Talence, France
Abstract :
The increasing interest in polymer materials creates the need for accurate tools to characterize their mechanical properties. Due to energy dissipation in polymers during deformation, these materials exhibit viscoelastic behavior. Accurate determination of these viscoelastic properties and, more specifically, viscous losses, remains challenging and mainly unknown for thin polymer films. In this paper, a straightforward method to determine the loss modulus of organic materials using resonating microcantilevers has been developed. The extracted results for polyisobutylene show the variation of viscous losses over a large range of frequencies (7-350 kHz).
Keywords :
cantilevers; deformation; micromechanical devices; polymer films; viscoelasticity; viscosity; deformation; energy dissipation; frequency 350 kHz to 7 kHz; loss modulus; mechanical properties; polyisobutylene; polymer materials; resonant microcantilevers; thin polymer films; viscoelasticity; viscous losses; Coatings; Loss measurement; Polymers; Q factor; Resonant frequency; Silicon; Integrated mechanical characterization; microcantilever; polymer viscoelasticity; quality factor;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2011.2159102