DocumentCode :
1266800
Title :
Resonant Microcantilevers for the Determination of the Loss Modulus of Thin Polymer Films
Author :
Ayela, Cédric ; Heinrich, Stephen M. ; Josse, Fabien ; Dufour, Isabelle
Author_Institution :
Lab. de l´´Integration du Materiau au Syst., Univ. de Bordeaux, Talence, France
Volume :
20
Issue :
4
fYear :
2011
Firstpage :
788
Lastpage :
790
Abstract :
The increasing interest in polymer materials creates the need for accurate tools to characterize their mechanical properties. Due to energy dissipation in polymers during deformation, these materials exhibit viscoelastic behavior. Accurate determination of these viscoelastic properties and, more specifically, viscous losses, remains challenging and mainly unknown for thin polymer films. In this paper, a straightforward method to determine the loss modulus of organic materials using resonating microcantilevers has been developed. The extracted results for polyisobutylene show the variation of viscous losses over a large range of frequencies (7-350 kHz).
Keywords :
cantilevers; deformation; micromechanical devices; polymer films; viscoelasticity; viscosity; deformation; energy dissipation; frequency 350 kHz to 7 kHz; loss modulus; mechanical properties; polyisobutylene; polymer materials; resonant microcantilevers; thin polymer films; viscoelasticity; viscous losses; Coatings; Loss measurement; Polymers; Q factor; Resonant frequency; Silicon; Integrated mechanical characterization; microcantilever; polymer viscoelasticity; quality factor;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2011.2159102
Filename :
5944943
Link To Document :
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