• DocumentCode
    1266800
  • Title

    Resonant Microcantilevers for the Determination of the Loss Modulus of Thin Polymer Films

  • Author

    Ayela, Cédric ; Heinrich, Stephen M. ; Josse, Fabien ; Dufour, Isabelle

  • Author_Institution
    Lab. de l´´Integration du Materiau au Syst., Univ. de Bordeaux, Talence, France
  • Volume
    20
  • Issue
    4
  • fYear
    2011
  • Firstpage
    788
  • Lastpage
    790
  • Abstract
    The increasing interest in polymer materials creates the need for accurate tools to characterize their mechanical properties. Due to energy dissipation in polymers during deformation, these materials exhibit viscoelastic behavior. Accurate determination of these viscoelastic properties and, more specifically, viscous losses, remains challenging and mainly unknown for thin polymer films. In this paper, a straightforward method to determine the loss modulus of organic materials using resonating microcantilevers has been developed. The extracted results for polyisobutylene show the variation of viscous losses over a large range of frequencies (7-350 kHz).
  • Keywords
    cantilevers; deformation; micromechanical devices; polymer films; viscoelasticity; viscosity; deformation; energy dissipation; frequency 350 kHz to 7 kHz; loss modulus; mechanical properties; polyisobutylene; polymer materials; resonant microcantilevers; thin polymer films; viscoelasticity; viscous losses; Coatings; Loss measurement; Polymers; Q factor; Resonant frequency; Silicon; Integrated mechanical characterization; microcantilever; polymer viscoelasticity; quality factor;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2011.2159102
  • Filename
    5944943