Series resistance method to obtain equivalent circuit of piezoelectric resonator

Author

Zheng, Fei ; Wu, X.S. ; He, Yu S. ; Chen, W.Y. ; Zhang, Wenpian Paul ; Cui, Fangshu ; Liu, Wenxin

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Nano/Micro Fabrication Technol., Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiao Tong Univ., Shanghai, China

Volume

48

Issue

17

fYear

2012

Firstpage

1054

Lastpage

1056

Abstract

The series resistance method (SRM) is introduced to obtain an equivalent circuit of a piezoelectric micro resonator. This method uses two series resistances respectively connected to driving electrodes of the resonator, and then detects the voltage amplitudes at the terminals of the series resistances and phase difference between them. Compared with the results of the impedance analyser, the deviations of resonance frequency, motional capacitance (C₁), motional inductance (L₁) of the SRM are 0.213%, 7.48%, and 7.62%, respectively. The SRM is easy to be realised in the laboratory. To a certain extent, it can replace the impedance analyser to attain the equivalent parameters of the piezoelectric micro resonator.

Keywords

crystal resonators; electrodes; equivalent circuits; micromechanical resonators; SRM; driving electrodes; equivalent circuit; impedance analyser; motional capacitance; motional inductance; piezoelectric microresonator; resonance frequency deviations; series resistance method; voltage amplitude detection;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el.2012.1909

Filename

6272447