Title :
Series resistance method to obtain equivalent circuit of piezoelectric resonator
Author :
Zheng, Fei ; Wu, X.S. ; He, Yu S. ; Chen, W.Y. ; Zhang, Wenpian Paul ; Cui, Fangshu ; Liu, Wenxin
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Nano/Micro Fabrication Technol., Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
The series resistance method (SRM) is introduced to obtain an equivalent circuit of a piezoelectric micro resonator. This method uses two series resistances respectively connected to driving electrodes of the resonator, and then detects the voltage amplitudes at the terminals of the series resistances and phase difference between them. Compared with the results of the impedance analyser, the deviations of resonance frequency, motional capacitance (C1), motional inductance (L1) of the SRM are 0.213%, 7.48%, and 7.62%, respectively. The SRM is easy to be realised in the laboratory. To a certain extent, it can replace the impedance analyser to attain the equivalent parameters of the piezoelectric micro resonator.
Keywords :
crystal resonators; electrodes; equivalent circuits; micromechanical resonators; SRM; driving electrodes; equivalent circuit; impedance analyser; motional capacitance; motional inductance; piezoelectric microresonator; resonance frequency deviations; series resistance method; voltage amplitude detection;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2012.1909
