• DocumentCode
    1268009
  • Title

    The Monte Carlo method for semiconductor device and process modeling

  • Author

    Lugli, Paol

  • Author_Institution
    Dipartimento di Ingegneria Meccanica, Roma Univ., Italy
  • Volume
    9
  • Issue
    11
  • fYear
    1990
  • fDate
    11/1/1990 12:00:00 AM
  • Firstpage
    1164
  • Lastpage
    1176
  • Abstract
    A critical review of the Monte Carlo (MC) simulation as applied to semiconductor device and process modeling is presented. The general method is discussed, and some special features that can be very useful in particular situations are examined. It is shown that the MC method is a mature technique for modeling and can offer great advantages over more traditional approaches. Critical points are pointed out and analyzed. A variety of applications are then outlined
  • Keywords
    Monte Carlo methods; reviews; semiconductor device models; semiconductor technology; Monte Carlo method; process modeling; review; semiconductor device; Application software; Debugging; Integrodifferential equations; Monte Carlo methods; Neutrons; Nuclear power generation; Probability; Semiconductor devices; Testing; Uncertainty;
  • fLanguage
    English
  • Journal_Title
    Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0070
  • Type

    jour

  • DOI
    10.1109/43.62753
  • Filename
    62753