Review of physical models for numerical simulation of semiconductor microsensors

With the increasing need for microsensors, development of simulation tools (based on adequate physical models to facilitate microsensor analysis and design) is a crucial task. The authors review the variety of physical approximations, model equations, and boundary conditions along with an outline of pertinent numerical procedures used in the numerical simulation of semiconductor microsensors. In particular, physical microsensors for thermal, optical, magnetic, and mechanical measurands are considered and selected simulation results are presented