High-Dynamics Low-Cost Flow Control With Solenoid Actuator for Ultrahigh Purity Applications

This paper presents a noninvasive closed-loop flow control system in a compact design for high-purity or aggressive chemical applications. The novel topology with a solenoid activated valve and an ultrasonic-based flow measurement permits precise flow control with rapid response time at a very low price. In this paper, the mechanical setup, power electronics, implemented closed-loop control, and the measurement of flow and valve stroke are discussed. Finally, the performance of the system is verified by a laboratory prototype.