Fabrication technologies for GaAs monolithic circuits
Author :
Turner, J.A.
Author_Institution :
Plessey Research (Caswell) Ltd., Allen Clark Research Centre, Towcester, UK
Volume :
27
Issue :
6
fYear :
1981
fDate :
6/1/1981 12:00:00 AM
Firstpage :
455
Lastpage :
458
Abstract :
The advent of integrated circuits in GaAs based on the field-effect transistor (FET) has opended up many new applications areas hitherto inaccessible by conventional silicon circuitry. In this article the technology for producing such circuits is described
