Title :
3D simulation of electrostatic-mechanical transducers using algebraic multigrid
Author :
Kaltenbacher, M. ; Landes, H. ; Reitzinger, S. ; Peipp, R.
Author_Institution :
Dept. of Sensor Technol., Univ. of Erlangen, Germany
fDate :
3/1/2002 12:00:00 AM
Abstract :
A finite-element (FE) simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. Therewith, the full coupling between the electric, mechanical, and acoustic field is taken into account. Since the entries of the electric system matrix (obtained by the FE method) vary as a function of the mechanical displacement, the algebraic system of equations for the electrostatic problem is solved by an appropriate algebraic multigrid method
Keywords :
capacitive sensors; electrostatic devices; ultrasonic transducers; 3D simulation; acoustic fluid; algebraic multigrid; algebraic system of equations; electric system matrix; electrostatic problem; electrostatic-mechanical transducers; full coupling; mechanical displacement; Acoustic transducers; Acoustic waves; Couplings; Electric potential; Electrostatics; Finite element methods; Iron; Nonlinear equations; Partial differential equations; Ultrasonic transducers;
Journal_Title :
Magnetics, IEEE Transactions on
