DocumentCode
1275097
Title
Thermionic-emission-based barrier height analysis for precise estimation of charge handling capacity in CCD registers
Author
Kawai, Shin Ichi ; Mutoh, Nobuhiko ; Teranishi, Nobukazu
Author_Institution
ULSI Appl. Res. Lab., NEC Corp., Kanagawa, Japan
Volume
44
Issue
10
fYear
1997
fDate
10/1/1997 12:00:00 AM
Firstpage
1588
Lastpage
1592
Abstract
In designing charge-coupled device (CCD) image sensors, it is essential to be able to estimate charge handling capacity. Because electrons have thermal energy, storing electrons in a well in a CCD register requires a sufficient potential barrier height to keep them from overflowing. As the quantity of electrons in a well depends on the barrier height, knowledge of this height is indispensable for precise estimation of the charge handling capacity. The authors have derived an expression describing the barrier height on the basis of thermionic emission, assuming current coefficient I0 and well capacitance C. We derived the current coefficient I0 and well capacitance C with computer simulations and from the results estimate the magnitude of the barrier height for a typical Vertical-CCD (V-CCD) structure. We have also examined barrier height dependence on structural parameters. Finally, we determined the barrier heights experimentally, and our results support the values obtained in the simulation
Keywords
CCD image sensors; capacitance; integrated circuit design; integrated circuit modelling; shift registers; thermionic electron emission; CCD registers; Vertical-CCD structure; charge handling capacity; charge-coupled device image sensors; computer simulations; current coefficient; design; potential barrier height; precise estimation; structural parameters; thermal energy; thermionic-emission-based barrier height analysis; well capacitance; Capacitance; Charge coupled devices; Charge transfer; Charge-coupled image sensors; Computer simulation; Electrodes; Electrons; Image analysis; Potential well; Thermionic emission;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.628808
Filename
628808
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