• DocumentCode
    1275624
  • Title

    The constraints on the design and use of silicon-diaphragm pressure sensors

  • Author

    Greenwood, J.H.

  • Author_Institution
    ERA Technology Ltd., Leatherhead, UK
  • Volume
    29
  • Issue
    2
  • fYear
    1983
  • fDate
    2/1/1983 12:00:00 AM
  • Firstpage
    170
  • Lastpage
    174
  • Abstract
    As with all devices, the silicon-diaphragm pressure sensor has limitations to both its design and field of application. This article highlights the types of compromise the designer of such devices is forced to make
  • fLanguage
    English
  • Journal_Title
    Electronics and Power
  • Publisher
    iet
  • ISSN
    0013-5127
  • Type

    jour

  • DOI
    10.1049/ep.1983.0077
  • Filename
    5186564
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1275624