Title :
Different Nanostructures From Different Plasmas: Nanoflowers and Nanotrees on Silicon
Author :
Ostrikov, K. ; Kumar, S. ; Cheng, Q.J. ; Rider, A.E. ; Yajadda, M.M.A. ; Han, Z.J. ; Seo, D.H. ; van der Laan, T.A. ; Yick, S. ; Tam, E. ; Levchenko, I.
Author_Institution :
CSIRO Mater. Sci. & Eng., Lindfield, NSW, Australia
Abstract :
Using the advanced radio-frequency plasma-assisted magnetron deposition system, various nanostructures such as nanoflowers of carbon nanotubes, ZnO nanobelts, and silicon nanotrees were successfully synthesized. In this paper, we present the photographs of ICP and magnetron discharges, the photograph of a complex plasma structure, and the SEM images of various nanostructures synthesized in the system with magnetron and ICP sources operating simultaneously.
Keywords :
II-VI semiconductors; carbon nanotubes; elemental semiconductors; nanofabrication; plasma deposition; scanning electron microscopy; silicon; wide band gap semiconductors; zinc compounds; C; SEM; Si; ZnO; ZnO nanobelts; carbon nanotubes; complex plasma structure; magnetron discharges; nanoflowers; radio-frequency plasma-assisted magnetron deposition; silicon nanotrees; Magnetic resonance imaging; Magnetic separation; Nanostructures; Plasmas; Radio frequency; Silicon; Substrates; Plasma applications; plasma materials processing; plasma sources;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2159022
