DocumentCode :
1276271
Title :
Optical Observation of Nitrogen Propagation in Argon Plasma
Author :
Ogawa, Daisuke ; Goeckner, Matthew J. ; Overzet, Lawrence J.
Author_Institution :
Univ. of Texas at Dallas, Richardson, TX, USA
Volume :
39
Issue :
11
fYear :
2011
Firstpage :
2544
Lastpage :
2545
Abstract :
While the gas flow patterns in reactors can be visualized using models, it has proven that it is difficult to measure them. This paper shows that the gas flow pattern for pulsed injection of nitrogen gas into argon plasma can be readily seen in the optical emission intensity. As N2 enters the Ar plasma, N2 molecules cause increased optical emission intensity by the Penning effect. This allows one to measure the N2 propagation. In this paper, we present the pictures with the measurement details and analysis.
Keywords :
Penning discharges; argon; nitrogen; plasma diagnostics; Ar; N; Penning effect; argon plasma; gas flow patterns; nitrogen propagation; optical emission intensity; optical observation; pulsed injection; Argon; Nitrogen; Optical imaging; Plasma measurements; Plasmas; Radio frequency; Stimulated emission; Argon; emission; image analysis; nitrogen; optical imaging; optical spectroscopy; plasma measurements; pressure effects; spraying; velocity measurement;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2011.2159625
Filename :
5957327
Link To Document :
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