Design and performance of a SAW ladder-type filter at 3.15 GHz using SAW mass-production technology [wireless LANs]

Author

Springer, Andreas ; Hollerweger, Franz ; Weigel, Robert ; Berek, Stefan ; Thomas, Ralf ; Ruile, Werner ; Ruppel, Clemens C W ; Guglielmi, Marco

Author_Institution

Inst. for Commun. & Inf. Eng., Linz Univ., Austria

Volume

47

Issue

12

fYear

1999

fDate

12/1/1999 12:00:00 AM

Firstpage

2312

Lastpage

2316

Abstract

To meet the increasing demand for high-performance filters in gigahertz radio-communication systems, we have improved the design techniques and fabrication processes for surface-acoustic wave (SAW) devices. The standard optical projection printing technique based on i-line lithography used for mass-production was optimized, thus attaining a linewidth of 0.3 μm. As a first SAW device prototype, we designed and fabricated a ladder-type bandpass filter from LiTaO₃ substrates, at 3.15 GHz having a 3 dB-bandwidth of 128 MHz and a minimum insertion loss of 1.7 dB

Keywords

band-pass filters; ladder filters; lithium compounds; microwave filters; photolithography; surface acoustic wave resonator filters; waveguide filters; wireless LAN; 0.3 micron; 1.7 dB; 128 MHz; 3.15 GHz; LiTaO₃; SAW ladder-type filter; SAW mass-production technology; bandpass filter; gigahertz radio-communication systems; i-line lithography; minimum insertion loss; optical projection printing technique; Lithography; Optical device fabrication; Optical devices; Optical filters; Optical surface waves; Printing; Prototypes; Surface acoustic wave devices; Surface acoustic waves; Surface waves;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.808976

Filename

808976