DocumentCode
1277303
Title
The process engineer´s workbench
Author
Strojwas, Andrzej J. ; Director, Stephen W.
Author_Institution
Dept. of Electr. & Comput. Eng., Carnegie-Mellon Univ., Pittsburgh, PA, USA
Volume
23
Issue
2
fYear
1988
fDate
4/1/1988 12:00:00 AM
Firstpage
377
Lastpage
386
Abstract
A workstation-based implementation of a software system aimed at VLSI fabrication process synthesis is described. The system provides a versatile user interface to a number of process design aids, and incremental simulation capability, and an attractive graphical display of simulation results
Keywords
CAD; VLSI; circuit layout CAD; engineering workstations; integrated circuit manufacture; integrated circuit technology; semiconductor technology; VLSI fabrication process synthesis; graphical display of simulation results; incremental simulation capability; process CAD; process design aids; process engineer´s workbench; process engineering; software system; user interface; workstation-based implementation; Circuit simulation; Computational modeling; Design automation; Displays; Etching; Fabrication; Fluctuations; Process design; Software systems; User interfaces; Very large scale integration;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/4.998
Filename
998
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