• DocumentCode
    1277697
  • Title

    Working equations for piezoelectric actuators and sensors

  • Author

    Weinberg, Marc S.

  • Author_Institution
    Charles Stark Draper Lab. Inc., Cambridge, MA, USA
  • Volume
    8
  • Issue
    4
  • fYear
    1999
  • fDate
    12/1/1999 12:00:00 AM
  • Firstpage
    529
  • Lastpage
    533
  • Abstract
    A new solution to the force, displacements, and charges developed in piezoelectric beams is derived. Differing from previous solutions, this development determines the neutral axis where the bending strains are zero and results in a closed form solution (without matrix inversion). With the closed form, simplifications become evident which increase understanding and facilitate calculations. These equations are than expanded to account for axial, built-in strains in the beam. A design example where axial forces exerted by the piezoelectric layer are important is presented
  • Keywords
    bending; microactuators; microsensors; piezoelectric actuators; piezoelectric transducers; axial strains; bending strains; built-in strains; closed form solution; microactuators; microsensors; neutral axis; piezoelectric actuators; piezoelectric beams; piezoelectric layer; piezoelectric sensors; Capacitive sensors; Closed-form solution; Conducting materials; Dielectric materials; Equations; Nonhomogeneous media; Piezoelectric actuators; Piezoelectric materials; Thermal stresses; Zinc oxide;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/84.809069
  • Filename
    809069