Title :
Working equations for piezoelectric actuators and sensors
Author :
Weinberg, Marc S.
Author_Institution :
Charles Stark Draper Lab. Inc., Cambridge, MA, USA
fDate :
12/1/1999 12:00:00 AM
Abstract :
A new solution to the force, displacements, and charges developed in piezoelectric beams is derived. Differing from previous solutions, this development determines the neutral axis where the bending strains are zero and results in a closed form solution (without matrix inversion). With the closed form, simplifications become evident which increase understanding and facilitate calculations. These equations are than expanded to account for axial, built-in strains in the beam. A design example where axial forces exerted by the piezoelectric layer are important is presented
Keywords :
bending; microactuators; microsensors; piezoelectric actuators; piezoelectric transducers; axial strains; bending strains; built-in strains; closed form solution; microactuators; microsensors; neutral axis; piezoelectric actuators; piezoelectric beams; piezoelectric layer; piezoelectric sensors; Capacitive sensors; Closed-form solution; Conducting materials; Dielectric materials; Equations; Nonhomogeneous media; Piezoelectric actuators; Piezoelectric materials; Thermal stresses; Zinc oxide;
Journal_Title :
Microelectromechanical Systems, Journal of