Title :
Analytical charge collection and MTF model for photodiode-based CMOS imagers
Author :
Lin, Chi-Shao S. ; Mathur, Bimal P. ; Chang, Mau-Chung F.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fDate :
5/1/2002 12:00:00 AM
Abstract :
An analytical charge collection model is derived to assess the impact of the photodiode size, doping profile and surface recombination velocity on the modulation transfer function (MTF) and the charge collection efficiency of CMOS imagers. The effects of the microlens and optical isolation are also quantitatively analyzed. The calculated MTF results agree well with measured data of fabricated imagers based on three different pixel designs
Keywords :
CMOS image sensors; doping profiles; integrated circuit modelling; microlenses; optical transfer function; photodiodes; surface recombination; MTF model; analytical charge collection model; charge collection efficiency; doping profile; microlens; modulation transfer function; optical isolation; photodiode size; photodiode-based CMOS imagers; pixel design; quantum efficiency; spatial resolution; surface recombination velocity; Analytical models; Doping profiles; Image analysis; Lenses; Microoptics; Optical modulation; Photodiodes; Semiconductor device modeling; Semiconductor process modeling; Transfer functions;
Journal_Title :
Electron Devices, IEEE Transactions on
