Title :
Uncooled infrared microbolometers on a flexible substrate
Author :
Yaradanakul, Alp ; Butler, Donald P. ; Çelik-Butler, Zeynep
Author_Institution :
Dept. of Electr. Eng., Southern Methodist Univ., Dallas, TX, USA
fDate :
5/1/2002 12:00:00 AM
Abstract :
Microbolometer infrared detectors based on semiconducting yttrium-barium-copper-oxide (YBCO) have been fabricated on a 125-μm-thick flexible polyimide substrate, Kapton(R). During the fabrication process, the highest temperature reached was 270°C, used to cure a polyimide insulation layer. The 60 μm×60 μm microbolometers displayed a temperature coefficient of resistance of -3.07%/K at room temperature. The thermal conductivity of the structure was measured to be 4.18×10-5 W/K. The bolometer response showed a linear dependence on bias current with a responsivity of 2×103 V/W and detectivity of 3×107 cm Hz1/2/W at 1.13 Hz and 1 μA bias
Keywords :
barium compounds; bolometers; infrared detectors; microsensors; superconducting semiconductors; thermal conductivity; yttrium compounds; 1 muA; 1.13 Hz; 270 C; Kapton; YBaCuO; curing; fabrication process; flexible polyimide substrate; infrared detector; polyimide insulation layer; semiconducting YBCO; temperature coefficient of resistance; thermal conductivity; uncooled microbolometer; Conductivity measurement; Fabrication; Infrared detectors; Insulation; Polyimides; Semiconductivity; Substrates; Temperature; Thermal conductivity; Yttrium barium copper oxide;
Journal_Title :
Electron Devices, IEEE Transactions on
