Performance of High- $Q$ Inductors in LTCC Using FTTF Techniques

Inductors have been produced in low-temperature co-fired ceramic in a manner that increases the cross-sectional area of the conductor. This geometry helps to compensate for high-frequency non-idealities, such as skin effect, current crowding and proximity effect. An array of various inductor geometries and probing structures has been fabricated and characterized. Qs of over 80 were confirmed, with Qs of over 100 believed to be possible. Accurate measurements of such values require careful consideration of error sources and the use of rigorous measurement techniques that are discussed. Finally, a filter has been fabricated to demonstrate the usefulness of these inductors in real-world applications.