Title :
Novel fingerprint scanning arrays using polysilicon TFT´s on glass and polymer substrates
Author :
Young, N.D. ; Harkin, G. ; Bunn, R.M. ; McCulloch, D J ; Wilks, R.W. ; Knapp, A.G.
Author_Institution :
Philips Res. Lab., Redhill, UK
Abstract :
Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low temperature (<250/spl deg/C) process.
Keywords :
arrays; capacitance measurement; electric sensing devices; elemental semiconductors; fingerprint identification; image scanners; image sensors; silicon; thin film transistors; 200 to 250 C; Si-SiO/sub 2/-Si/sub 3/N/sub 4/; addressing; capacitance sensing; capacitor electrode; fingerprint scanning arrays; glass substrate; low temperature process; polyethersulphone substrate; polyimide substrate; polysilicon TFT; read out; Capacitance; Capacitive sensors; Capacitors; Electrodes; Fingerprint recognition; Glass; Polyimides; Substrates; Thin film sensors; Thin film transistors;
Journal_Title :
Electron Device Letters, IEEE
