Microfluidic-packaged CMOS chemiresistor detector for micro-scale gas chromatograph

The implementation of a microfluidic `detector cell` is presented, which integrates a nanofabricated chemiresistor (CR) array with monolithic CMOS baseline cancellation circuitry and a microfluidic chamber for use in a micro-scale gas chromatograph (`GC). A robust packaging method was developed to facilitate a microfluidic interface between the detector cell and external `GC components while also reducing dead volume and the sorbence of sample vapours. The efficacy of the integrated detector cell was elucidated by consistent chip responses taken from a 4`2 CR array fabricated on the silicon dioxide surface of a custom-designed CMOS readout chip.