DocumentCode
1280190
Title
Direct writing of planar waveguide power splitters and directional couplers using a focused ultraviolet laser beam
Author
Svalgaard, M.
Author_Institution
Microelectron. Centre, Tech. Univ., Lyngby, Denmark
Volume
33
Issue
20
fYear
1997
fDate
9/25/1997 12:00:00 AM
Firstpage
1694
Lastpage
1695
Abstract
Planar waveguide power splitters and directional couplers have been fabricated in silica using a continuous wave UV laser beam. The performance in terms of size, excess loss and spectral response is similar to that obtained with other techniques, while the fabrication time per device is a few minutes
Keywords
laser materials processing; optical directional couplers; optical fabrication; optical planar waveguides; optical waveguide components; power dividers; CW UV laser beam; SiO2; continuous wave laser beam; direct writing; fabrication time; focused ultraviolet laser beam; planar directional couplers; planar waveguide power splitters; silica; spectral response;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19971138
Filename
629536
Link To Document