Microdischarge arrays: a new family of photonic devices (revised*)

Author

Sung-Jin Park ; Chen, J. ; Wagner, C.J. ; Ostrom, N.P. ; Chang Liu ; Eden, J. Gary

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

Volume

8

Issue

2

fYear

2002

Firstpage

387

Lastpage

394

Abstract

The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 /spl mu/m)/sup 2/ in emitting area (nanoliters in volume) and arrays as large as 30 /spl times/ 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.

Keywords

fluidic devices; glow discharges; integrated optics; micro-optics; microfluidics; plasma displays; electrical characteristics; emitting area; fluidic systems; gas pressures; infrared; mechanical systems; metal/polymer structures; microdischarge arrays; microoptical sources; microoptoelectronic systems; optical characteristics; photonic devices; photons; semiconductors; vacuum ultraviolet; Atmosphere; Electric variables; Fluidic microsystems; Microfluidics; Nanoscale devices; Optical arrays; Optical devices; Optical polymers; Stimulated emission; Vacuum systems;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/2944.999194

Filename

999194