Title :
Guest editorial special section on issues related to semiconductor manufacturing at technology nodes below 70 nm
Author :
Singh, Rajdeep ; Doering, R.R. ; Koike, Hideaki ; Kinam Kim ; Heyns, Marc
Author_Institution :
Clemson University
fDate :
5/1/2002 12:00:00 AM
Keywords :
CMOS technology; Capacitors; Conferences; MOSFETs; Metrology; Paper technology; Random access memory; Semiconductor device manufacture; Silicon on insulator technology; Voltage;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2002.999583
