• DocumentCode
    1280501
  • Title

    Guest editorial special section on issues related to semiconductor manufacturing at technology nodes below 70 nm

  • Author

    Singh, Rajdeep ; Doering, R.R. ; Koike, Hideaki ; Kinam Kim ; Heyns, Marc

  • Author_Institution
    Clemson University
  • Volume
    15
  • Issue
    2
  • fYear
    2002
  • fDate
    5/1/2002 12:00:00 AM
  • Firstpage
    133
  • Lastpage
    136
  • Keywords
    CMOS technology; Capacitors; Conferences; MOSFETs; Metrology; Paper technology; Random access memory; Semiconductor device manufacture; Silicon on insulator technology; Voltage;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2002.999583
  • Filename
    999583
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1280501