DocumentCode :
1280559
Title :
Guest editorial special section on microelectronic test structures
Author :
Hazama, Hirofumi
Author_Institution :
Toshiba Corporation Semiconductor Company
Volume :
15
Issue :
2
fYear :
2002
fDate :
5/1/2002 12:00:00 AM
Firstpage :
194
Lastpage :
194
Keywords :
CMOS technology; Circuit testing; Manufacturing processes; Material properties; Materials testing; Microelectronics; Nonvolatile memory; Parameter extraction; Process design; Very large scale integration;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2002.999591
Filename :
999591
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1280559
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