InP-Based Monolithically Integrated Tunable Wavelength Filters in the 1.6–1.8 $\mu$ m Wavelength Region for Tunable Laser Purposes

In this paper, we present the design, fabrication, and characterization of two monolithically InP-based integrated electro-optically tunable filters. The combination of these filters can be used to achieve a filter with a narrow passband and a large free spectral range. These filters are designed to be used in an integrated tunable laser source in the 1600-1800 nm wavelength region using active-passive integration technology. The fact that these filters worked successfully shows that this integration technology, originally designed to be used around 1550 nm wavelength, can also be used successfully in the 1600-1800 nm wavelength region without a large penalty in performance. The two filters, a high-resolution arrayed waveguide grating-type filters and a low-resolution multimode interferometer-tree-type filter are made tunable using 5 mm long electro-optic phase modulators in the arms of the waveguide arrays. Measurements show that these filters can be tuned over a wavelength range of more than 100 nm with an accuracy of 0.1 nm (1% of the free spectral range) for the high-resolution filter and an accuracy of 9 nm (4% of the free spectral range) for the low-resolution filter.