• DocumentCode
    1282299
  • Title

    Vector-voltage scanning force probe for noncontact MMIC measurement

  • Author

    Bridges, G.E.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Manitoba Univ., Winnipeg, Man., Canada
  • Volume
    35
  • Issue
    20
  • fYear
    1999
  • fDate
    9/30/1999 12:00:00 AM
  • Firstpage
    1724
  • Lastpage
    1725
  • Abstract
    A vector-voltage scanning force probe capable of noncontact high-frequency amplitude and phase measurement at internal points of MMICs is presented. Accurate localised measurements can be made without complex calibration or circuit depassivation. A probe with a 10 GHz bandwidth, <1 fF load and a submicrometre spatial resolution is demonstrated
  • Keywords
    MMIC; atomic force microscopy; integrated circuit measurement; microwave measurement; phase measurement; 10 GHz; high-frequency amplitude measurement; high-frequency phase measurement; internal points; localised measurements; noncontact MMIC measurement; submicrometre spatial resolution; vector-voltage scanning force probe;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19991154
  • Filename
    811144
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1282299