DocumentCode :
1282370
Title :
Silicon on insulator the PCB on chip
Author :
Dettmer, Roger
Volume :
33
Issue :
4
fYear :
1987
fDate :
4/1/1987 12:00:00 AM
Firstpage :
273
Lastpage :
277
Abstract :
As a building material for integrated circuits silicon on insulator (SOI) has a number of clear advantages over single-crystal silicon. A major research effort promises to make SOI substrates more readily available and this could have important implications for the development of sub-micrometre CMOS
fLanguage :
English
Journal_Title :
Electronics and Power
Publisher :
iet
ISSN :
0013-5127
Type :
jour
DOI :
10.1049/ep.1987.0171
Filename :
5187958
Link To Document :
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