DocumentCode
1282370
Title
Silicon on insulator the PCB on chip
Author
Dettmer, Roger
Volume
33
Issue
4
fYear
1987
fDate
4/1/1987 12:00:00 AM
Firstpage
273
Lastpage
277
Abstract
As a building material for integrated circuits silicon on insulator (SOI) has a number of clear advantages over single-crystal silicon. A major research effort promises to make SOI substrates more readily available and this could have important implications for the development of sub-micrometre CMOS
fLanguage
English
Journal_Title
Electronics and Power
Publisher
iet
ISSN
0013-5127
Type
jour
DOI
10.1049/ep.1987.0171
Filename
5187958
Link To Document