• DocumentCode
    1282370
  • Title

    Silicon on insulator the PCB on chip

  • Author

    Dettmer, Roger

  • Volume
    33
  • Issue
    4
  • fYear
    1987
  • fDate
    4/1/1987 12:00:00 AM
  • Firstpage
    273
  • Lastpage
    277
  • Abstract
    As a building material for integrated circuits silicon on insulator (SOI) has a number of clear advantages over single-crystal silicon. A major research effort promises to make SOI substrates more readily available and this could have important implications for the development of sub-micrometre CMOS
  • fLanguage
    English
  • Journal_Title
    Electronics and Power
  • Publisher
    iet
  • ISSN
    0013-5127
  • Type

    jour

  • DOI
    10.1049/ep.1987.0171
  • Filename
    5187958