Title :
HRTEM Images of a-C:H Thin Films Deposited by G-TVA Technique
Author :
Vladoiu, Rodica ; Ciupina, Victor ; Contulov, Mirela ; Mandes, Aurelia ; Dinca, Virginia ; Prodan, Madalina
Author_Institution :
Dept. of Plasma Phys., Ovidius Univ. of Constanta, Constanta, Romania
Abstract :
The aim of this paper is to an report analysis of the different characteristics of the coatings obtained by an extension in applicability of the thermionic vacuum arc method, i.e., gaseous thermionic vacuum arc using gases as precursors, instead of solid materials. The morphology and structure of the film were investigated by transmission electron microscopy (TEM) provided by high-resolution TEM with 1.4-Å resolution and 1.2-M magnification.
Keywords :
carbon; hydrogen; thin films; transmission electron microscopy; vacuum deposited coatings; C:H; HRTEM; coatings; gaseous thermionic vacuum arc method; high-resolution transmission electron microscopy; morphology; thin films; Anodes; Carbon; Cathodes; Discharges; Materials; Plasmas; Vacuum arcs; Gaseous thermionic vacuum arc (GTVA); high-resolution TEM (HRTEM); thermionic vacuum arc (TVA);
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2160973
