• DocumentCode
    1282430
  • Title

    HRTEM Images of a-C:H Thin Films Deposited by G-TVA Technique

  • Author

    Vladoiu, Rodica ; Ciupina, Victor ; Contulov, Mirela ; Mandes, Aurelia ; Dinca, Virginia ; Prodan, Madalina

  • Author_Institution
    Dept. of Plasma Phys., Ovidius Univ. of Constanta, Constanta, Romania
  • Volume
    39
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2802
  • Lastpage
    2803
  • Abstract
    The aim of this paper is to an report analysis of the different characteristics of the coatings obtained by an extension in applicability of the thermionic vacuum arc method, i.e., gaseous thermionic vacuum arc using gases as precursors, instead of solid materials. The morphology and structure of the film were investigated by transmission electron microscopy (TEM) provided by high-resolution TEM with 1.4-Å resolution and 1.2-M magnification.
  • Keywords
    carbon; hydrogen; thin films; transmission electron microscopy; vacuum deposited coatings; C:H; HRTEM; coatings; gaseous thermionic vacuum arc method; high-resolution transmission electron microscopy; morphology; thin films; Anodes; Carbon; Cathodes; Discharges; Materials; Plasmas; Vacuum arcs; Gaseous thermionic vacuum arc (GTVA); high-resolution TEM (HRTEM); thermionic vacuum arc (TVA);
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2011.2160973
  • Filename
    5961639
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1282430