• DocumentCode
    1283082
  • Title

    Wide Bandwidth Silicon Nitride Grating Coupler

  • Author

    Doerr, Christopher R. ; Chen, Long ; Chen, Young-Kai ; Buhl, Larry L.

  • Author_Institution
    Bell Labs., Alcatel-Lucent, Holmdel, NJ, USA
  • Volume
    22
  • Issue
    19
  • fYear
    2010
  • Firstpage
    1461
  • Lastpage
    1463
  • Abstract
    We demonstrate a one-dimensional grating coupler in silicon nitride with a 67-nm 1-dB bandwidth, the largest reported for a grating coupler butt-coupled to standard single-mode fiber. The peak coupling efficiency is -4.2dB. It requires no partial etch and requires only 0.6-μm fabrication resolution.
  • Keywords
    diffraction gratings; integrated optics; optical fibre couplers; optical fibre fabrication; silicon compounds; wide band gap semiconductors; Si3N4; fabrication resolution; integrated optics; peak coupling efficiency; single-mode fiber; wide bandwidth silicon nitride 1D grating coupler; Bandwidth; Couplers; Coupling circuits; Etching; Fiber gratings; Gratings; Optical coupling; Optical fiber couplers; Optical fiber polarization; Optical waveguides; Semiconductor waveguides; Silicon; Grating coupler; integrated optics; optical fiber; silicon nitride;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2010.2062497
  • Filename
    5535118
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1283082