• DocumentCode
    1283390
  • Title

    Investigation of Surface Etching of Poly(Ether Ether Ketone) by Atmospheric-Pressure Plasmas

  • Author

    Fricke, Katja ; Reuter, Stephan ; Schröder, Daniel ; Schulz-von der Gathen, Volker ; Weltmann, Klaus-Dieter ; Von Woedtke, Thomas

  • Author_Institution
    Leibniz Inst. for Plasma Sci. & Technol. (INP Greifswald e.V.), Greifswald, Germany
  • Volume
    40
  • Issue
    11
  • fYear
    2012
  • Firstpage
    2900
  • Lastpage
    2911
  • Abstract
    An atmospheric-pressure argon plasma jet with varying admixtures of molecular oxygen was used to study the etching mechanism of poly(ether ether ketone) (PEEK). Furthermore, a correlation between plasma-based etching processes on PEEK with the generation of chemically reactive plasma species is proposed. The surface analysis was performed by X-ray photoelectron spectroscopy, atomic force microscopy, and surface profilometry which showed a dramatic increase in the content of oxygen functionalities and surface roughness after long-time Ar/O2-plasma treatment. For the plasma diagnostics, two-photon absorption laser-induced fluorescence spectroscopy was applied. The obtained etching mass as well as the surface roughness for different molecular oxygen admixtures revealed a strong dependence on the atomic-oxygen density. Furthermore, the radial surface profile, affected by plasma etching, might be attributed to the distribution of plasma-generated oxygen species in the plasma jet effluent.
  • Keywords
    X-ray photoelectron spectra; atomic force microscopy; etching; fluorescence; polymers; surface roughness; X-ray photoelectron spectroscopy; atmospheric-pressure argon plasma jet; atomic force microscopy; atomic-oxygen density; molecular oxygen; plasma diagnostics; plasma-based etching processes; poly(ether ether ketone); surface etching; surface profilometry; surface roughness; two-photon absorption laser-induced fluorescence spectroscopy; Argon; Etching; Plasmas; Plastics; Rough surfaces; Surface roughness; Atmospheric-pressure plasma jet; modification; plasma etching; surface topology;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2012.2212463
  • Filename
    6298969