DocumentCode
1284550
Title
Graphene Interconnect Lifetime: A Reliability Analysis
Author
Chen, Xiangyu ; Seo, David H. ; Seo, Sunae ; Chung, Hyunjong ; Wong, H. -S Philip
Author_Institution
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Volume
33
Issue
11
fYear
2012
Firstpage
1604
Lastpage
1606
Abstract
Understanding the breakdown current density is not enough for establishing the reliability performance of graphene interconnects. It is more important to know how graphene wires degrade with time under constant current stress and how that compares with conventional interconnects. This letter investigates the lifetime of graphene interconnect under constant high current stress. Under a stress current density of 20 MA/cm2 at 250°C exposed to air, the mean time to fail of a 3-μm-wide 100-μm-long graphene interconnect is approximately 6 h, slightly worse than the extrapolated electromigration lifetime of a copper interconnect capped with CoWP at the same stress current density. Raman study shows that the interconnect failure is mainly caused by defect formation due to graphene oxidation. This suggests that optimizing the capping material for graphene interconnect will substantially improve the reliability lifetime of graphene interconnects.
Keywords
Raman spectra; copper; current density; electromigration; failure analysis; graphene; interconnections; oxidation; reliability; stress analysis; C; Cu; Raman study; breakdown current density; capping material; constant current stress; defect formation; extrapolated electromigration lifetime; graphene interconnect lifetime; graphene oxidation; graphene wires; interconnect failure; reliability analysis; size 100 mum; size 3 mum; stress current density; temperature 250 degC; Current density; Electric breakdown; Graphene; Integrated circuit interconnections; Reliability; Wires; Graphene; interconnect; lifetime; reliability; wires;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2012.2211564
Filename
6302166
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