• DocumentCode
    1285220
  • Title

    Low-loss PECVD silica channel waveguides for optical communications

  • Author

    Grand, G. ; Jadot, J.P. ; Denis, H. ; Valette, S. ; Fournier, A. ; Grouillet, A.M.

  • Author_Institution
    LETI, CEA-CENG, Grenoble, France
  • Volume
    26
  • Issue
    25
  • fYear
    1990
  • Firstpage
    2135
  • Lastpage
    2137
  • Abstract
    The authors report reproducible measurements of propagation losses in channel waveguides fabricated on silicon substrate by PECVD. The average value obtained from more than 50 different channel guides is 0.1 dB/cm at 1.55 mu m. The behaviour with wavelength is also presented and discussed.
  • Keywords
    integrated optics; optical communication equipment; optical losses; optical waveguides; plasma CVD; silicon compounds; 1.55 micron; IOS2 technology; PECVD; Si; Si-SiO 2; channel waveguides; integrated optics; optical communications; propagation losses; reproducible measurements;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19901375
  • Filename
    59642
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1285220