Physics-Based Analytical Model for HCS Degradation in STI-LDMOS Transistors

A physics-based analytical model for the on-resistance in the linear transport regime and its application as an alternative tool for the investigation of the hot-carrier stress degradation in shallow-trench-isolation-based laterally diffused MOS devices are presented. The extraction of the model and its validation by comparison with experimental and TCAD data are reported. A thorough investigation of the degradation under low- and high-gate stress biases, corresponding to saturation and impact-ionization regimes, is carried out to gain an insight on the overall bias and temperature dependences of the parameter drifts.