Title :
Integrating CAM and process simulation to enhance on-line analysis and control of IC fabrication
Author :
Macdonald, Angus J. ; Walton, Anthony J. ; Robertson, J.M. ; Holwill, Robert J.
Author_Institution :
Dept. of Electr. Eng., Edinburgh Univ., UK
fDate :
5/1/1990 12:00:00 AM
Abstract :
The integration of a process simulator with a commercial computer-aided manufacturing (CAM) system to provide a set of powerful tools for process analysis, diagnosis, and control is described. The CAM system acts as the interface to the simulator and maintains the simulation control data as part of the process specification. Making process simulation available in a manufacturing environment allows engineers to intuitively investigate the process, thus aiding their understanding of the interrelation of process steps. A microprocessing scenario in an application-specific integrated circuit (ASIC) facility is used to demonstrate how the system can be used to analyze options for corrective processing. It can also be used for documenting processes, to simplify process transfer and implementation, and for investigating the effect of corrective processing on device reliability
Keywords :
CAD/CAM; digital simulation; electronic engineering computing; integrated circuit manufacture; manufacturing computer control; manufacturing data processing; ASIC facility; CAM; IC fabrication; application-specific integrated circuit; computer-aided manufacturing; corrective processing; device reliability; manufacturing environment; on-line analysis; online diagnosis; online process analysis; process simulation; simulation control data; Analytical models; Application specific integrated circuits; CADCAM; Circuit simulation; Computational modeling; Computer aided manufacturing; Computer simulation; Control system analysis; Manufacturing processes; Virtual manufacturing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
