Design of very small electromagnetic and electrostatic micro motors

The paper describes a general design tool that can be used for small and extra small electric and magnetic devices. Such devices generate micro motions. Due to their dimensions and specially due to the short axial length compared to the radial dimensions a three dimensional analysis of the field is required. Complex geometries recommend a well tuned engineering tool to guarantee reliable results. Here, a standard three dimensional finite element approach is chosen to compute the electric and magnetic field quantities respectively. In combination with a user-friendly computer interface, controlling the necessary finite element procedures, a powerful engineering tool with a general application range is obtained. For that reason it was possible to apply numerical optimization algorithms to realize a fully automated design tool. Various configurations are studied using the same software tools. The paper aims at the application of the finite element method (FEM)