DocumentCode :
1287287
Title :
A new SrBi4Ti4O15/CaBi4Ti4O15 thin-film capacitor for excellent electric stability
Author :
Noda, Minoru ; Nomura, Shuhei ; Uchida, Hiroshi ; Yamashita, Kaoru ; Funakubo, Horoshi
Author_Institution :
Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan
Volume :
59
Issue :
9
fYear :
2012
fDate :
9/1/2012 12:00:00 AM
Firstpage :
1888
Lastpage :
1893
Abstract :
SrBi4Ti4O15 (SBTi) and CaBi4Ti4O15 (CBTi) dielectric films of bismuth layered-structure dielectrics (BLSD) are prepared on Pt(100) film for constructing stacked-type dielectric capacitors; it is observed that they are c-axis single-oriented crystalline films. Compared with the perovskite barium titanate family of (Ba,Sr)TiO3 (BST), it is observed that the SBTi film keeps a low leakage of 10-7 A/cm2 at 250 kV/ cm, which is smaller by an order of magnitude than the BST film, even with thinner SBTi film. The temperature coefficient of capacitance (TCC) of the SBTi or CBTi film is about 100 to 250 ppm/K and is much smaller than that of the perovskite BST film. Because the SBTi and CBTi films have opposite polarities of TCC in this experiment, they are expected to cancel out the temperature dependence in the SBTi/CBTi composite capacitor. These results indicate that the BLSD films of SBTi and CBTi are effective for application in high-temperature and high-permittivity capacitors with the practical barium perovskite oxide family.
Keywords :
barium compounds; bismuth compounds; calcium compounds; platinum; strontium compounds; thin film capacitors; (BaSr)TiO3; CBTi dielectric films; Pt; Pt(100) film; SBTi dielectric films; SBTi/CBTi composite capacitor; SrBi4Ti4O15-CaBi4Ti4O15; bismuth layered-structure dielectrics; c-axis single-oriented crystalline films; electric stability; perovskite barium titanate; stacked-type dielectric capacitors; temperature coefficient of capacitance; thin-film capacitor; Capacitance; Capacitors; Crystals; Electric fields; Films; Permittivity; Temperature dependence;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2012.2402
Filename :
6306004
Link To Document :
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