DocumentCode
1287352
Title
Acoustic wave filter based on periodically poled lithium niobate
Author
Courjon, Emilie ; Bassignot, Florent ; Ulliac, Gwenn ; Benchabane, Sarah ; Ballandras, Sylvain
Author_Institution
Franche Comte Electron. Mec. Thermique et Opt.-Sci. et Technol. (FEMTO-ST) Inst., Besancon, France
Volume
59
Issue
9
fYear
2012
fDate
9/1/2012 12:00:00 AM
Firstpage
1942
Lastpage
1949
Abstract
Solutions for the development of compact RF passive transducers as an alternative to standard surface or bulk acoustic wave devices are receiving increasing interest. This article presents results on the development of an acoustic band-pass filter based on periodically poled ferroelectric domains in lithium niobate. The fabrication of periodically poled transducers (PPTs) operating in the range of 20 to 650 MHz has been achieved on 3-in (76.2-mm) 500-μm-thick wafers. This kind of transducer is able to excite elliptical as well as longitudinal modes, yielding phase velocities of about 3800 and 6500 ms-1, respectively. A new type of acoustic band-pass filter is proposed, based on the use of PPTs instead of the SAWs excited by classical interdigital transducers. The design and the fabrication of such a filter are presented, as well as experimental measurements of its electrical response and transfer function. The feasibility of such a PPT-based filter is thereby demonstrated and the limitations of this method are discussed.
Keywords
band-pass filters; ferroelectric materials; interdigital transducers; lithium compounds; surface acoustic wave filters; surface acoustic wave transducers; transfer functions; LiNbO3; PPT-based filter; SAW; acoustic band-pass filter; acoustic wave filter; bulk acoustic wave devices; classical interdigital transducers; compact RF passive transducers; electrical response; frequency 20 MHz to 650 MHz; longitudinal modes; periodically poled ferroelectric domains; periodically poled lithium niobate; periodically poled transducer fabrication; size 3 in to 500 mum; transfer function; Acoustics; Band pass filters; Electrodes; Fabrication; Standards; Transducers; Transversal filters;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2012.2411
Filename
6306013
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