DocumentCode :
1287722
Title :
Multiferroic Bi 0.7Dy/ 0.3 FeO3 films as high k dielectric material for advanced non-volatile memory devices
Author :
Prashanthi, K. ; Duttagupta, S.P. ; Pinto, R. ; Palkar, V.R.
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
Volume :
45
Issue :
16
fYear :
2009
Firstpage :
821
Lastpage :
822
Abstract :
Gate dielectric materials having high dielectric constant, low interface state density and good thermal stability are needed for advanced CMOS applications. In this letter, the electrical properties of novel multiferroic Bi0.7Dy0.3FeO3 (BDFO) thin films deposited using the pulsed laser deposition technique on p-type (100) silicon substrate are reported. Using high frequency capacitance-voltage (C-V) measurements, the dielectric constant, effective oxide charge density and interface state density were estimated. The results suggest the potential application of multiferroic BDFO films as gate dielectric material for novel memory devices that can be electrically written and magnetically read.
Keywords :
CMOS integrated circuits; bismuth compounds; dysprosium compounds; high-k dielectric thin films; multiferroics; permittivity; pulsed laser deposition; random-access storage; silicon; thermal stability; Bi0.7Dy0.3FeO3; advanced CMOS applications; capacitance-voltage measurements; dielectric constant; electrical properties; high k dielectric material; multiferroic thin films; nonvolatile memory devices; oxide charge density; p-type silicon substrate; pulsed laser deposition; thermal stability;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el.2009.0712
Filename :
5191338
Link To Document :
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