Diagnostic system to determine the in-service life of dry vacuum pumps [used in LPCVD semiconductor fabrication facility]

Author

Konishi, S. ; Yamasawa, K.

Author_Institution

Dept. of Electr. & Electron. Eng., Shinshu Univ., Nagano, Japan

Volume

146

Issue

6

fYear

1999

fDate

11/1/1999 12:00:00 AM

Firstpage

270

Lastpage

276

Abstract

A diagnostic system for dry pumps is proposed. It predicts future pump motor current from time-series in-situ measurements. The prediction system has been constructed using a data acquisition system with an online system identification software algorithm. A field test on a low pressure chemical vapour deposition (LPCVD) system for the silicon nitride process predicted large values of motor current, some of which correlated well with actual motor currents as the pump became clogged. The combined use of the predicted motor current and the stability criteria shows promise in predicting the actual service life of a dry pump

Keywords

automatic test software; autoregressive moving average processes; chemical vapour deposition; control engineering computing; data acquisition; electronic engineering computing; identification; integrated circuit manufacture; life testing; maintenance engineering; recursive estimation; stability criteria; time series; vacuum pumps; ARMAX model; LPCVD system; actual service life; data acquisition system; diagnostic system; dry vacuum pumps; future pump motor current; in-service life determination; online system identification software algorithm; preventive maintenance; recursive computation; semiconductor fabrication facility; stability criteria; system model; time-series in-situ measurements;

fLanguage

English

Journal_Title

Science, Measurement and Technology, IEE Proceedings -

Publisher

iet

ISSN

1350-2344

Type

jour

DOI

10.1049/ip-smt:19990654

Filename

815884