Title :
Atomic ordering effect on SiGe electronic structure
Author :
Yen-Tien Tung ; Chen, Eason ; Tzer-Min Shen ; Okuno, Yoshihiro ; Chung-Cheng Wu ; Wu, Junyong ; Diaz, Carlos H.
Author_Institution :
TCAD Div., Taiwan Semicond. Manuf. Co. (TSMC), Hsinchu, Taiwan
Abstract :
In this paper, a realistic atomic model is used to study the atomic ordering effect on electronic structures of Si0.5Ge0.5. The hybrid density functional theory (DFT), HSE06, is chosen as the methodology. The calculated bandgap and effective masses of Si and Ge at various symmetry points are first validated by the reported experimental data and empirical pseudo-potential method (EPM) calculations. The study of two different Si0.5Ge0.5 atomic configurations shows that the SiSi-GeGe case is more stable than SiGe-SiGe (RS2 structure). In addition, the electron effective masses of the former one are larger than those of the latter one, and those calculated by EPM with virtual crystal approximation (VCA). This large electron effective mass is attributed to the localized electron orbital of the lowest anti-bonding state in the SiSi-GeGe case which leads to a flat E-k curve. However, no obvious ordering effect on hole effective mass is found.
Keywords :
Ge-Si alloys; MOSFET; carrier mobility; density functional theory; effective mass; electronic structure; energy gap; localised states; orbital calculations; pseudopotential methods; DFT; EPM calculations; HSE06; RS2 structure; Si0.5Ge0.5 atomic configurations; Si0.5Ge0.5; SiGe electronic structure; SiGe-SiGe structure; SiSi-GeGe case; VCA; atomic ordering effect; bandgap; electron effective masses; empirical pseudopotential method; flat E-k curve; hole effective mass; hybrid density functional theory; localized electron orbital; lowest antibonding state; realistic atomic model; symmetry points; virtual crystal approximation; Approximation methods; Atomic measurements; Discrete Fourier transforms; Effective mass; Photonic band gap; Silicon; Silicon germanium; SiliconGermanium; atomic ordering effect; band structure; effective mass; hybrid DFT; molecular orbital; realistic atomic model;
Conference_Titel :
Simulation of Semiconductor Processes and Devices (SISPAD), 2014 International Conference on
Conference_Location :
Yokohama
Print_ISBN :
978-1-4799-5287-8
DOI :
10.1109/SISPAD.2014.6931565