DocumentCode :
1288584
Title :
Self-temperature-testing of the quartz resonant force sensor
Author :
Dong, Yong-Gui ; Wang, Jin-Song ; Feng, Guan-Ping ; Wang, Xiao-Hong
Author_Institution :
Dept. of Precision Instrum. & Mech., Tsinghua Univ., Beijing, China
Volume :
48
Issue :
6
fYear :
1999
fDate :
12/1/1999 12:00:00 AM
Firstpage :
1038
Lastpage :
1040
Abstract :
Temperature characteristics of a quartz resonant force sensor are important features, which should be seriously considered in the sensor´s practical application. This paper analyzes the temperature characteristics of a quartz resonant force sensor and presents a self-temperature-testing method for the sensor by analyzing the different temperature characteristics when the quartz resonator vibrates in its fundamental mode and in its third overtone mode. A beat frequency results from the resonator´s fundamental and third overtone frequencies. Experimental result show that the sensor´s operating temperature can be measured by making use of this beat frequency rather than applying a temperature sensor
Keywords :
compensation; crystal resonators; electric sensing devices; electron device testing; force sensors; measurement errors; quartz; temperature measurement; testing; SiO2; beat frequency; force sensor; fundamental mode; quartz resonant force sensor; quartz resonator; self-temperature-testing; temperature characteristics; temperature measurement; temperature sensor; third overtone mode; Force measurement; Force sensors; Frequency measurement; Harmonic analysis; Resonance; Resonant frequency; Sensor phenomena and characterization; Temperature dependence; Temperature measurement; Temperature sensors;
fLanguage :
English
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9456
Type :
jour
DOI :
10.1109/19.816110
Filename :
816110
Link To Document :
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