• DocumentCode
    1288584
  • Title

    Self-temperature-testing of the quartz resonant force sensor

  • Author

    Dong, Yong-Gui ; Wang, Jin-Song ; Feng, Guan-Ping ; Wang, Xiao-Hong

  • Author_Institution
    Dept. of Precision Instrum. & Mech., Tsinghua Univ., Beijing, China
  • Volume
    48
  • Issue
    6
  • fYear
    1999
  • fDate
    12/1/1999 12:00:00 AM
  • Firstpage
    1038
  • Lastpage
    1040
  • Abstract
    Temperature characteristics of a quartz resonant force sensor are important features, which should be seriously considered in the sensor´s practical application. This paper analyzes the temperature characteristics of a quartz resonant force sensor and presents a self-temperature-testing method for the sensor by analyzing the different temperature characteristics when the quartz resonator vibrates in its fundamental mode and in its third overtone mode. A beat frequency results from the resonator´s fundamental and third overtone frequencies. Experimental result show that the sensor´s operating temperature can be measured by making use of this beat frequency rather than applying a temperature sensor
  • Keywords
    compensation; crystal resonators; electric sensing devices; electron device testing; force sensors; measurement errors; quartz; temperature measurement; testing; SiO2; beat frequency; force sensor; fundamental mode; quartz resonant force sensor; quartz resonator; self-temperature-testing; temperature characteristics; temperature measurement; temperature sensor; third overtone mode; Force measurement; Force sensors; Frequency measurement; Harmonic analysis; Resonance; Resonant frequency; Sensor phenomena and characterization; Temperature dependence; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.816110
  • Filename
    816110