• DocumentCode
    1288977
  • Title

    The nanostructuring of materials for device and sensor applications

  • Author

    Oda, S. ; Moore, D.F. ; Milne, W.I.

  • Author_Institution
    Res. Centre for Quantum Effect Electron., Tokyo Inst. of Technol., Japan
  • Volume
    8
  • Issue
    6
  • fYear
    1999
  • fDate
    12/1/1999 12:00:00 AM
  • Firstpage
    281
  • Lastpage
    285
  • Abstract
    This paper reviews advances in nanotechnology and includes a discussion of microelectronics and microsystems. The main emphasis is on silicon technology, where the electrical properties are used in circuit applications and the mechanical properties are used in a growing range of sensor and micromechanical applications
  • Keywords
    microsensors; nanotechnology; Si; electrical properties; integrated circuit; mechanical properties; microelectronics; micromechanical device; microsystem; nanotechnology; sensor; silicon technology;
  • fLanguage
    English
  • Journal_Title
    Engineering Science and Education Journal
  • Publisher
    iet
  • ISSN
    0963-7346
  • Type

    jour

  • DOI
    10.1049/esej:19990607
  • Filename
    816162
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1288977