Title :
The nanostructuring of materials for device and sensor applications
Author :
Oda, S. ; Moore, D.F. ; Milne, W.I.
Author_Institution :
Res. Centre for Quantum Effect Electron., Tokyo Inst. of Technol., Japan
fDate :
12/1/1999 12:00:00 AM
Abstract :
This paper reviews advances in nanotechnology and includes a discussion of microelectronics and microsystems. The main emphasis is on silicon technology, where the electrical properties are used in circuit applications and the mechanical properties are used in a growing range of sensor and micromechanical applications
Keywords :
microsensors; nanotechnology; Si; electrical properties; integrated circuit; mechanical properties; microelectronics; micromechanical device; microsystem; nanotechnology; sensor; silicon technology;
Journal_Title :
Engineering Science and Education Journal
DOI :
10.1049/esej:19990607
