Title :
A new simplified two-dimensional model for the threshold voltage of MOSFET´s with nonuniformly doped substrate
Author :
Lin, Pole-Shang ; Wu, Ching-Yuan
Author_Institution :
Coll. of Eng., Nat. Chiao-Tung Univ., Hsin-Chu, Taiwan
fDate :
6/1/1991 12:00:00 AM
Abstract :
A new simplified two-dimensional model for the threshold voltage of MOSFETs is derived in terms of simple characteristic functions. These characteristic functions are transformed from the exact series solution of the two-dimensional Poisson´s equation, in which the effects of a nonuniformly doped substrate and a finite graded source-drain junction depth are included. In this model, charge-screening effects are proposed to account for the weak dependence of the threshold voltage on the substrate bias for short-channel MOSFETs, and exact source and drain boundary potentials can be approximated by their equivalent power functions. The accuracy of the simplified 2-D model is verified by 2-D numerical analysis. Moreover, comparisons between the simplified 2-D model and the experimental results are made, and good agreement is obtained for wide ranges of channel lengths, applied substrate, and drain biases
Keywords :
insulated gate field effect transistors; semiconductor device models; 2-D model; 2-D numerical analysis; channel lengths; characteristic functions; charge-screening effects; drain bias; drain biases; drain boundary potentials; equivalent power functions; experimental results; graded source-drain junction depth; nonuniformly doped substrate; short-channel MOSFETs; simplified two-dimensional model; source boundary potentials; substrate bias; threshold voltage; two-dimensional Poisson´s equation; Analytical models; Boundary conditions; Dielectric substrates; Doping; Green function; MOSFET circuits; Numerical analysis; Poisson equations; Semiconductor process modeling; Threshold voltage;
Journal_Title :
Electron Devices, IEEE Transactions on