Title :
A framework for robust run by run control with lot delayed measurements
Author :
Baras, John S. ; Patel, Nital S.
Author_Institution :
Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
fDate :
2/1/1997 12:00:00 AM
Abstract :
This paper considers the run by run control problem. We develop a framework to solve such a problem in a robust fashion. The framework also encompasses the case when the system is subject to delayed measurements. Recent results available for the control of such systems are reviewed, and two examples are presented. The first example is based on the end-pointing problem for a deposition process, and is subject to noise which has both Gaussian and uniform components. The second one is concerned with rate control in an LPCVD reactor
Keywords :
chemical vapour deposition; process control; robust control; Gaussian noise; LPCVD reactor; deposition; end-pointing; lot delayed measurements; rate control; robust run by run control; semiconductor processing; uniform noise; Automatic control; Automatic generation control; Control systems; Delay; Electronics industry; Gaussian noise; Inductors; Noise robustness; Robust control; Semiconductor device noise;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
