Title :
Closed-loop measurement of equipment efficiency and equipment capacity
Author :
Leachman, Robert C.
Author_Institution :
Dept. of Ind. Eng. & Oper. Res., California Univ., Berkeley, CA, USA
fDate :
2/1/1997 12:00:00 AM
Abstract :
Formal definitions for the components of efficiency and capacity, mathematical formulas for computing overall efficiency, and data collection strategies are proposed for rigorous measurement of equipment efficiency and equipment capacity. Measurement of overall equipment efficiency (OEE) under the TPM paradigm is extended to support the maintenance of capacity parameters for production planning. The weaknesses or equipment analyzes based on utilization and aggregate UPH (units per hour) figures are contrasted against the robustness of the proposed approach. Applications in semiconductor factories are discussed
Keywords :
data acquisition; integrated circuit manufacture; management; planning; production; semiconductor device manufacture; TPM paradigm; aggregate UPH figures; closed-loop measurement; data collection strategies; equipment capacity; equipment efficiency; production planning; semiconductor factories; units per hour figures; Aggregates; Capacity planning; Electronic equipment manufacture; Job shop scheduling; Processor scheduling; Production facilities; Production planning; Productivity; Robustness; Semiconductor device manufacture;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
