Selenium-Doped Silicon-on-Insulator Waveguide Photodetector With Enhanced Sensitivity at 1550 nm

This letter describes the fabrication and characterization of a silicon-on-insulator all silicon rib waveguide photodetector with sensitivity at 1550 nm. Response at the subbandgap wavelength is provided through the introduction of deep levels via Se ion implantation. Se ions were implanted into the waveguide using an ion beam energy of 240 keV at a dose of 3×10¹⁵ cm^-2. The most efficient device has a responsivity of 25 mA/W at 3 V reverse bias. The fabrication is fully compatible with standard complementary metal-oxide-semiconductor processes.