Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 varactors directly fabricated on a LiTaO3 wafer

Author

Kimura, Tomohiro ; Kobayashi, Hideo ; Kishimoto, Yutaka ; Kato, Haruhisa ; Inaba, Masayuki ; Hashimoto, Ken-ya ; Matsumura, Takeshi ; Hirano, Harutoyo ; Kadota, Mitsuhiro ; Esashi, Masayoshi ; Tanaka, Shoji

Author_Institution

Murata Manuf. Co., Ltd., Kyoto, Japan

fYear

2014

fDate

3-6 Sept. 2014

Firstpage

795

Lastpage

798

Abstract

A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO₃ wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO₃ substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.

Keywords

barium compounds; lithium compounds; surface acoustic wave resonators; varactors; wafer level packaging; BST varactors; BaSrTiO₃; BaSrTiO₃ varactors; LiTaO₃; LiTaO₃ wafer fabrication; SAW resonators; frequency 1 GHz; frequency 4.5 MHz to 9.6 MHz; high deposition temperature; performance deterioration; prototyped bandwidth-tunable filter; special cared wafer integration process; surface acoustic wave resonators; voltage 0 V to 10 V; Films; Lithium compounds; Radio frequency; Resonator filters; Substrates; Surface acoustic waves; Varactors; BaSrTiO3; LiTaO3; tunable filter;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2014 IEEE International

Conference_Location

Chicago, IL

Type

conf

DOI

10.1109/ULTSYM.2014.0195

Filename

6931763